The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 24, 1987

Filed:

Oct. 05, 1984
Applicant:
Inventor:

Thijs W Bril, Sunnyvale, CA (US);

Assignee:

Signetics Corporation, Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B44C / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
437 18 ; 156644 ; 156653 ; 156656 ; 156657 ; 1566591 ; 156643 ; 2041923 ; 20419232 ; 437192 ;
Abstract

Planarized insulating layers provided with planarized contacts are formed on semiconductor devices by forming vias through an insulating layer having a generally planar exposed surface, depositing a layer of a conductive layer on this upper surface of the insulating layer in an amount at least sufficient to at least partially fill all of the vias, depositing a planarized layer on the exposed surface of the conductive layer and then etching away the planarized layer and the conductive layer by use of an etchant that removes the planarized layer and the conductive layer at substantially the same rate, until the generally planar upper surface of the insulating layer is exposed.


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