The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 1987
Filed:
Jun. 19, 1985
Applicant:
Inventors:
Assignee:
Thomson-CSF, Paris, FR;
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 41 ; 148D / ; 148D / ; 156643 ; 156649 ; 357 237 ; 357 47 ; 357 56 ; 437101 ; 437235 ;
Abstract
The invention relates to a method for the manufacture of field effect transistors of the coplanar and self-aligned type, obtained in thin film form on an insulating substrate. As a result of electrode self-alignment and ion implantation, the method makes it possible to use only three masking levels. The invention is applicable to the field of large surface microelectronics and particularly to the control and addressing of a flat liquid crystal screen or an image sensor.