The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 1987
Filed:
Dec. 23, 1983
Applicant:
Inventors:
Robert J Carlson, Brooklyn Park, MN (US);
Paulette S Shelburne, Brooklyn Park, MN (US);
Assignee:
Honeywell Inc., Minneapolis, MN (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B44C / ;
U.S. Cl.
CPC ...
156656 ; 156657 ; 156662 ; 156664 ; 252 793 ;
Abstract
Thin films of chromium/silicon/nitrogen are etched in a solution of HF, H.sub.2 O.sub.2, HCl, and H.sub.2 O.