The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 1987
Filed:
Jun. 26, 1986
Adrianus G Bouwer, Eindhoven, NL;
U.S. Philips Corporation, New York, NY (US);
Abstract
A positioning device comprising a first and a second support (9, 11) which are interconnected by a parallelogram mechanism of elastically deformable rods (17), the first and the second support (9, 11) together being displaceable in horizontal planes with a maintained position of the first support (9) in vertical direction, while with a maintained position of the first support (9) in a horizontal plane that support (9) is displaceable in vertical direction by means of a substantially frictionless relative displacement in horizontal direction of the second support (11) with respect to the first support (9). The positioning device is particularly suitable for displacements of an object in the submicron range, such as, for example, in optical lithographic devices.