The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 1987
Filed:
Jan. 24, 1986
International Business Machines Corporation, Armonk, NY (US);
Abstract
An Auger electron microscope is equipped with a field-emission tip maintained at an essentially constant distance above the surface of the specimen. The tip may consist of a tungsten (100) whisker having a radius of .about.50 nm at the apex, the working distance being on the order of 1 mm. Auger electrons emitted from the surface of the specimen are collected by an electron energy analyzer for conventional processing. Mutual scanning displacement between the tip and specimen is obtained through use of an xyz-drive module, which is also responsible for adjusting the working distance of the tip. The entire microscope setup is mounted on vibration damping means and may be inserted into a vacuum system by means of an appropriate flange, if desired.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile