The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 1987
Filed:
Dec. 21, 1983
Applicant:
Inventor:
Graham J Siddall, Woodside, CA (US);
Assignee:
Hewlett-Packard Company, Palo Alto, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05G / ;
U.S. Cl.
CPC ...
378 34 ; 2504922 ;
Abstract
An apparatus for micropositioning an X-ray lithography mask has but a single stage plate for supporting the mask, three piezoelectric transducers for moving the stage plate in the X-Y plane, and three flexure assemblies located equiangularly around the stage plate for supporting the stage plate and for moving the stage plate in the Z-axis. The flexure assemblies each include a single piezoelectric transducer and various flex strips to allow relative motion of the stage plate to occur smoothly in all six of the possible degrees of freedom.