The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 1987

Filed:

Dec. 24, 1985
Applicant:
Inventors:

Georges Slodzian, Sceaux, FR;

Bernard Daigne, Chatenay Malabry, FR;

Francois Girard, Paris, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250309 ; 250310 ; 250398 ; 250399 ;
Abstract

A sample (EC) is mounted on a sample carrier (PO). Vertically thereabove a common optical portion (5) receives a beam of primary ions derived from an ion source (S10) together with a beam of primary electrons derived from an electron source (S30). The secondary electrons and ions due to the sample (EC) being bombarded by said primary ions and electrons are retrieved by said common optical portion (5). The electrons are detected by electron detection means (D40). The secondary optical system (2) transmits the secondary ions to a mass spectrometer (SP20). This instrument is capable of providing ion and electron images of a single sample simultaneously.


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