Method for producing spinning nozzle plates

Abstract

A method for producing spinning nozzle plates having spinning nozzle channels employs a mold plate which contains mold channels corresponding to the spinning nozzle channels. The mold plate is initially connected with a galvanic electrode containing feed channels which communicate with the mold channels. Then negatives of the spinning nozzle channels are produced by filling the mold channels and the feed channels with an electrically insulating molding material and thereafter removing the mold plate, so that columns of molding material remain connected to the galvanic electrode. Finally, a galvanic layer enclosing the negatives of the spinning nozzle channels is produced, the galvanic layer is leveled, and the negatives as well as the remaining mold material are removed. The mold plate itself may be produced by depositing a layer of resist material on a further galvanic electrode, irradiating the resist layer in a predetermined pattern using high energy radiation, selectively removing portions of the irradiated resist layer to produce negatives that are connected to the further galvanic electrode, depositing a further galvanic layer, and removing the negatives. These techniques permit economical production of spinning nozzle plates, particularly plates having nozzle capillaries with specially shaped cross sections and small critical dimensions.