The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 1987
Filed:
Apr. 30, 1986
Joseph M Pimbley, Schenectady, NY (US);
Gennady Gildenblat, Schenectady, NY (US);
Ching-Yeu Wei, Schenectady, NY (US);
Joseph Shappir, Jerusalem, IL;
General Electric Company, Schenectady, NY (US);
Abstract
Hot electron injection into the gate oxides of MOSFET devices imposes limitations on the miniaturization of such devices in VLSI circuits. A buried channel with a surface spacer is provided to guard against hot electron trapping effects while preserving process and structure compatibility with micron or submicron VLSI devices. The channel current is redirected into a buried channel at a distance away from the interface in the vicinity of the drain region where the hot electron effect is most likely to occur. Additionally, a surface implant is performed to improve any gate control that may be lost as a result of the buried channel so as to mitigate any degradition of the current-voltage characteristics of the device.