The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 1987
Filed:
May. 05, 1986
Applicant:
Inventors:
Hideyuki Suzuki, Machida, JP;
Katsunori Terada, Sagamihara, JP;
Yuichi Masaki, Kawasaki, JP;
Kenji Morimoto, Ise, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ; G03F / ;
U.S. Cl.
CPC ...
430313 ; 430 22 ; 430323 ; 430329 ; 430394 ;
Abstract
A method of forming a pattern on a surface of a workpiece. The workpiece surface is coated with photoresist. Part of the coated workpiece surface is exposed and developed to form an alignment mark. An unexposed portion of the photoresist coated workpiece surface is then exposed, developed and etched.