The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 1987
Filed:
May. 27, 1983
Applicant:
Inventors:
Masayasu Nagashima, Yokohama, JP;
Nobuo Iijima, Tama, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G / ;
U.S. Cl.
CPC ...
406 88 ; 34236 ; 34 5 / ;
Abstract
A method for transporting an article disposed on an upper surface of a stage in a vacuum. Gas is ejected through a plurality of inclined nozzles formed in the stage so that the article is transported in the direction of inclination of the nozzles.