The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 25, 1987

Filed:

Mar. 10, 1986
Applicant:
Inventors:

Hans-Detlef Brust, Dudweiler, DE;

Johann Otto, Bad Toelz, DE;

Assignee:

Siemens Aktiengesellschaft, Berlin and Munich, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
3241 / ;
Abstract

A method and apparatus for determination of specific points on a specimen carrying a signal having a specific signal frequency by use of a scanning microscope. A detector provides a secondary electrical signal corresponding to respective particular scan points. An output of the detector connects to first and second evaluation circuits which each output a signal based on and representative of the specific signal frequency. The first evaluation circuit has a band-width substantially narrower than the second evaluation circuit. An output signal of the second evaluation circuit determines when to switch a scanning generator of the scanning microscope from a first scan rate to a second slower scan rate. The output signal of the first evaluation circuit is employed for evaluation relative to the specific points carrying the specific signal frequency.


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