The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 1987
Filed:
Apr. 28, 1986
Applicant:
Inventors:
Katsunori Yokoyama, Ebina, JP;
Chiaki Tanuma, Tokyo, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
310317 ; 310328 ;
Abstract
A position adjustment device employs a holder on which a semiconductor wafer is attached. When placed on a surface plate, the wafer holder is turned upside-down, so that unlocked leg rods and the pattern transfer surface of the wafer are in direct contact with a reference surface of the plate. Piezoelectric elements are embedded in the holder as locking mechanism for the movable leg rods. In response to a variable DC voltage supplied by a voltage generating circuit, the piezoelectric elements deform to lock the rods with high accuracy.