The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 1987
Filed:
Jan. 16, 1986
David W Hoffman, Ann Arbor, MI (US);
Cassimer M Kukla, Taylor, MI (US);
Ford Motor Company, Dearborn, MI (US);
Abstract
In measuring stresses present in material coatings deposited by sputtering, a pressure transducer is used as an in-situ sensor. The transducer has a flexible conductive surface clamped about its periphery to a rigid substrate and forms a variable capacitor with a relatively rigid conductor across an underlying evacuated chamber. A mask element having an aperture that covers an area confined within the boundary defined by the underlying evacuated space is located adjacent the flexible conductive surface to limit the exposed surface area to receive sputtered material coating. Electronic circuitry monitors changes in the capacitance of the sensor and reflects the stress types and values attributed to each coating.