Sample stand adjusting device in an ultrasonic microscope

Abstract

In an ultrasonic microscope, if a plane to be observed of a sample is not parallel with a scanned plane formed by an ultrasonic wave beam, an interference with a reflected wave will be produced and no clear picture image will be obtained. Therefore, it is indispensable to adjust the inclination of the sample stand as an initial adjustment before the observation. In the present invention, for this adjustment, an acoustic lens is focused at any one point o of a sample mounted on the sample stand, then a distance Zo between the acoustic lens and sample is measured and memorized and the relative displacement Xa of the sample and acoustic lens from the point o to a point a in the X-direction, the relative displacement Yb in the Y-direction and the relative moving distances Za-Zo ad Za-Zb (wherein Za and Zb are distances between the respective points a and b and the acoustic lens) of the above mentioned acoustic lens and the sample in the Z-direction when the acoustic lens is focused at the respective points a and b are measured and memorized. The inclination of the sample is known on the basis of the scalar data of these respective measured and memorized distances and the required adjusting amount is monitored and indicated so that the adjustment may be easily made without requiring a skill.