The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 21, 1987

Filed:

Dec. 27, 1985
Applicant:
Inventors:

Wolf-Eckhart Bulst, Vaterstetten, DE;

Gertrud Lindemann, Munich, DE;

Peter Zibis, Munich, DE;

Assignee:

Siemens Aktiengesellschaft, Berlin and Munich, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H / ; H03H / ; H01L / ;
U.S. Cl.
CPC ...
333195 ; 29 2535 ; 3103 / ; 427100 ;
Abstract

Digital structures of a surface wave filter are manufactured in a photolithographic method with a lift-off or with an etching technique. The surface wave filter comprises at least one resonator structure, this resonator structure having auxiliary coatings of the substrate surface allocated to it. These auxiliary coatings are continuations of existing, neighboring pads which compensate during an exposure step associated with manufacture of the digital structures.


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