The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 21, 1987

Filed:

Sep. 25, 1984
Applicant:
Inventor:

Gernot Thorn, Hanau am Main, DE;

Assignee:

Leybold-Heraeus GmbH, Cologne, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ; G01B / ; G01R / ;
U.S. Cl.
CPC ...
324230 ; 73159 ; 324 / ; 427 10 ;
Abstract

Arrangement for electrically measuring coating thickness on travelling webs in vacuum deposition apparatus. A plurality of sensors are arranged with respect to a roller around which the web runs each with a spatially limited measuring region. These produce signals which represent a measure for the coating thickness. The signals can be indicated by an evaluating circuit. To avoid a falsification of the measuring signals as a result of the tendency of the travelling web to flutter, according to the invention the sensors (3,4,5) are arranged in the roller (1) against its surface and are distributed lengthwise of the roller. The sensors are connected to the evaluating circuit (7) by a transfer device (28). Preferably, the sensors rotate with the roller.


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