The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 21, 1987

Filed:

Dec. 11, 1985
Applicant:
Inventor:

Erwin Sick, Icking, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ; H05K / ; G01R / ;
U.S. Cl.
CPC ...
356394 ; 350-68 ; 356398 ;
Abstract

An optoelectric comparison apparatus for structures on plane surfaces or for planar structures has a laser light source 35 the operational light beam of which is split into two component beams 21, 22 by an optical displacement device 26, 25 for laterally displacing part of a beam. These two component light beams 21, 22 impinge on the mirror surfaces of a mirror wheel 11 obliquely to the axis of rotation 20. Two mutually crossed flat first strip mirrors 12, 13 are arranged in the direction of the light reflected from the mirror wheel 11 and each receive only one of the emergent component light beams 14, 15. The emergent component light beams 14, 15 are deflected in substantially opposite directions where, in each case, a further plane second strip mirror 16, 17 is provided which reflects the light to the scanning surface parallel to the light beams 14, 15 which enter into the first strip mirrors 12, 13.


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