The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 1987
Filed:
Mar. 28, 1985
Hans-Detlef Brust, Dudweiler, DE;
Siemens Aktiengesellschaft, Berlin and Munich, DE;
Abstract
With the method and apparatus for the detection and/or imaging of a measuring point which carries a voltage at least of a specific frequency, wherein, in a scanning particle or radiation microscope, a voltage contrast signal is further processed into a measuring signal by a lock-in amplifier, a spectral analysis of a voltage carried at the measuring point is possible even when one or more frequencies from the spectrum of this signal are unknown. A reference signal is supplied to the lock-in amplifier at a frequency fb which is varied over a frequency range. A signal regarding the magnitude of the frequency fb of the reference signal is transmitted to a device for the recording of the measuring signal so that the measuring signal can be indicated in dependence upon the frequency fb of the reference signal.