The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 1987
Filed:
Jun. 27, 1985
Mitsuya Sato, Yokohama, JP;
Bunei Hamasaki, Yokohama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A probing apparatus for use in examination of a chip formed on a wafer, in co-operation with a sheet-like member having probe needles to be contacted to the chip on the wafer, the probing apparatus being arranged so that the positions of the probe needles of the sheet-like member, when it is held by a holder of the probing apparatus, are detected automatically and, in accordance with the detected positions, the sheet-like member is displaced automatically so as to be aligned with the probing apparatus. According to another aspect of the invention, the position of the wafer when it is at a location under the probe needles is detected automatically and, in accordance with the detected position, the wafer is displaced so as to be aligned with the sheet-like member which has been aligned automatically with the probing apparatus. In one preferred form, a TV camera is provided at a position above the probing station, the TV camera being adapted to view the probe needles of the sheet-like member during positioning of it and to view the wafer when it is at a probing station, during positioning of the wafer.