The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 1987
Filed:
Mar. 03, 1986
Applicant:
Inventors:
Roger E Nelson, Sylmar, CA (US);
Clyde L Lucky, Sylmar, CA (US);
Assignee:
Sierracin Corporation, Sylmar, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
204298 ; 118712 ; 118715 ; 20419213 ; 356382 ; 356435 ;
Abstract
An optical transmission monitor for determining the optical transmissivity and thickness of films deposited on a substrate. A monitor substrate in the form of a rotating disk exposed to the deposition process is used. An optical system for measuring the transmissivity of the disk obstructs a fixed segment of the rotating disk so that the film thickness on the monitor disk is a known fraction of the film on the substrate being processed.
Nelson, Roger. (1987). Optical disk transmission monitor for deposited films (U.S. Patent No. 4676883). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4676883
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile