The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 1987

Filed:

Feb. 18, 1986
Applicant:
Inventor:

Mark B Spitzer, Lexington, MA (US);

Assignee:

Spire Corporation, Bedford, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
148 333 ; 136255 ; 136261 ; 148-15 ; 148176 ; 357 30 ; 357 91 ;
Abstract

A passivated deep p/n junction obtained by ion implantation is disclosed. The passivated deep p/n junction is formed in a wafer, preferably a silicon wafer, thus providing an emitter region that is both lightly doped and extending to a depth of about one micrometer. The emitter region in turn is provided with a surface layer so as to reduce surface recombination. Preferably, the surface layer is a silicon oxide layer of about 0.01 micrometer thickness. The p/n junction is obtained by ion implantation whereby the dopant is introduced at room temperature and then distributed thermally. The surface layer preferably is formed near the end of the thermal distribution by admitting a small amount of dry oxygen to a gas stream, and passing the gas stream along the surface of the wafer.


Find Patent Forward Citations

Spitzer, Mark. (1987). Passivated deep p/n junction (U.S. Patent No. 4676845). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4676845

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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