The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 1987
Filed:
Oct. 12, 1984
Masahiro Yamazaki, Yokohama, JP;
Shigeru Iizuka, Yokohama, JP;
Shigemitsu Kamiya, Kawasaki, JP;
Yoshiro Oka, Yokohama, JP;
Katsuhiro Fujino, Yokohama, JP;
Nippon Zeon Co., Ltd., Tokyo, JP;
Fujitsu Limited, Kanagawa, JP;
Abstract
An apparatus for feeding a variety of doping liquid used in doping-liquid treatment processes for electronic materials such as semiconductors and precision machinery components, and a feeding monitor apparatus. More specifically, it relates to an apparatus for stably feeding the doping liquid while detecting its volume, in the case where the doping liquid is fed from a liquid-filled hermetic returnable can to the doping liquid treatment process, and a feeding monitor apparatus is connected between the returnable can and treatment process.