The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 1987
Filed:
Nov. 25, 1985
Applicant:
Inventors:
Earl R Lory, Hopewell Township, Mercer County, NJ (US);
Leonard J Olmer, Hopewell Township, Mercer County, NJ (US);
Assignee:
AT&T Technologies, Inc., Berkeley Heights, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D / ;
U.S. Cl.
CPC ...
204164 ; 427 39 ;
Abstract
A high quality Al.sub.2 O.sub.3 film is deposited by means of plasma enhanced chemical vapor deposition by passing a trialkylaluminum vapor over the surface of a substrate and CO.sub.2 gas as the oxidant in a plasma above the substrate surface. The CO.sub.2 is controlled to prevent particle formation due to gas phase reaction in the plasma as opposed to directly on the substrate surface.
Quick Actions:
Lory, Earl. (1987). Low temperature deposition method for high quality aluminum oxide films (U.S. Patent No. 4675089). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4675089
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile