The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 1987

Filed:

Mar. 25, 1985
Applicant:
Inventor:

Jeffrey L Cannon, Sunnyvale, CA (US);

Assignee:

Coherent, Inc., Palo Alto, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S / ;
U.S. Cl.
CPC ...
372 33 ; 372 34 ; 372-4 ; 372 69 ; 372 59 ;
Abstract

A method and apparatus for reducing gas pressure in a laser wherein a miniature cryogenic pump is constructed to comprise an integral part of a laser plasma tube. The pump includes a container which holds molecular sieve material, a conduit which permits communication between the container and the plasma tube, and a valve which controls the communication along the conduit. All connections between the container, conduit, valve and plasma tube are gas-tight so as to maintain the ion integrity of the plasma tube with respect to the atmosphere. In operation, a service engineer immerses the container in a refrigerant, such as liquid nitrogen, and opens the valve until the pressure in the plasma tube reaches the desired level. Thereafter the valve is closed and the container permitted to return to ambient temperature. Further in accordance with the present invention, means are provided for preventing over pressure in the container. In the event that other gases are introduced into the container due to leaks in the pump or plasma tube, a puncturing pin is positioned in relation to a diaphragm, which diaphragm expands into contact with the puncturing pin when there is an over pressure condition in the container.


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