The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 1987
Filed:
Feb. 16, 1984
Applicant:
Inventors:
Joel Hartmann, Claix, FR;
Pierre Jeuch, Seyssins, FR;
Assignee:
Commissariat a l'Energie Atomique, Paris, FR;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R / ; G01R / ; G01R / ;
U.S. Cl.
CPC ...
3241 / ; 3241 / ; 324 / ; 324 725 ;
Abstract
A device for checking the mobile electrical charges in a MOS integrated circuit having a wafer support, a polarization means applying a potential difference between the two faces of the silicon wafer on which are formed the integrated circuits by means of two electrodes, one constituted by a conductive diaphragm covering the silicon wafer and which is kept in contact with the silicon wafer by a pressure difference between these two faces, while the other is constituted by the electrically conductive wafer support.