The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 1987
Filed:
Oct. 11, 1985
Applicant:
Inventors:
Victor S Dolat, Chelmsford, MA (US);
Daniel J Ehrlich, Lexington, MA (US);
Jeffrey Y Tsao, Albuquerque, NM (US);
Assignee:
Massachusetts Institute of Technology, Cambridge, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; B44C / ; C23F / ;
U.S. Cl.
CPC ...
3103 / ; 29 2535 ; 156643 ; 156646 ; 156656 ; 1566591 ; 2191 / ; 2191 / ; 310318 ; 333193 ; 367157 ; 427 531 ;
Abstract
A phase and amplitude compensated surface acoustic wave (SAW) structure is described in which computer controlled compensation is achieved by laser chemical etching of selective portions of a compound chemical film deposited on the surface of a piezoelectric SAW substrate in the path of propagation. The compound film comprises a layer of amplitude attenuating cermet material formed on the substrate and a phase compensating layer of molybdenum formed over the cermet material and in contact with the substrate surface.