The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 1987
Filed:
May. 07, 1986
Applicant:
Inventor:
Stephen C Pyke, Willowick, OH (US);
Assignee:
The Standard Oil Company, Cleveland, OH (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23F / ; B44C / ; C03C / ; C03C / ;
U.S. Cl.
CPC ...
156652 ; 156643 ; 156644 ; 156656 ; 1566591 ; 29571 ; 204 / ; 204416 ; 252 795 ; 324 715 ; 340634 ; 357 25 ; 357 41 ;
Abstract
A method is disclosed for forming a chemically sensitive field-effect transistor having a suspended gate which enables the uniform and reproducible manufacture of such devices. Controlled uniformity and device response is provided by this method which makes the field-effect transistors suitable for use as sensors, alarms and analyzers for gases. A method of regenerating a chemically sensitive field-effect transistor having a suspended gate is also disclosed.