The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 1987
Filed:
Jan. 23, 1985
Applicant:
Inventor:
Toru Yunoki, Chigasaki, JP;
Assignee:
Ulvac Service Corporation, Chigasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
210141 ; 2101982 ;
Abstract
Apparatus for controlling an infinitesimal flow rate of fluid comprises at least one filter means (3, 3A, 3B, 3C, 3D, . . . ) provided in a fluid passage and capable of setting to a predetermined filtration amount, thereby regulating the flow rate of the fluid by controlling fluid supply to said filter means. The present apparatus may be used in a vacuum processing system.