The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 1987
Filed:
Apr. 21, 1986
Applicant:
Inventors:
Reinhard Maerz, Munich, DE;
Gerhard Heise, Munich, DE;
Assignee:
Siemens Aktiengesellschaft, Berlin and Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; B44C / ;
U.S. Cl.
CPC ...
156649 ; 2956 / ; 156651 ; 1566591 ; 156662 ; 252 791 ; 252 792 ; 372 44 ;
Abstract
A method for manufacturing a surface grating on a mesa structure of a laser includes etching a substrate surface by wet-chemical etching to form a surface grating of defined grating constant, masking regions of the surface grating corresponding to the mesa structure, and further etching the unmasked regions to transfer the surface grating to the more deeply situated surface regions of the mesa structure while retaining substantially the same grating constant.