The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 1987
Filed:
Jul. 17, 1985
Applicant:
Inventors:
Assignee:
Balzers AG, , LI;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
204298 ; 2041921 ;
Abstract
In conventional attachments of target plates for cathode sputtering the danger always existed that they will become plastically deformed at the operating temperature and detach from a cooling support. For secure attachment without fastening means on the front side to be disintegrated, the target plate according to the invention presents on its back a cutout (4) in which there is inserted by means of a mechanical spring union, e.g. by means of a lock ring (8), an auxiliary body (6) of a material of higher strength and higher softening point than the material to be disintegrated, which body has a threaded bore (12) for attachment of the target plate on a support (1).