The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 1987
Filed:
Oct. 23, 1985
Charles B Zarowin, Rowayton, CT (US);
The Perkin-Elmer Corporation, Norwalk, CT (US);
Abstract
The present invention is directed to method and apparatus for figuring a surface by plasma assisted chemical transport by means of mounting the surface to be processed on at least one electrode of an R.F. driven reactor having two parallel plate electrodes; passing reactive gas through the reactor to establish gas discharge by the R.F. power; while controlling the ion energies of the reactive gas; and while controlling the removal rate of different areas of the surface by using a substantially smaller surface area electrode than said surface area so that varying the amount of time the small surface area electrode spends at each region shapes the surface. According to one aspect of the invention optical measurement of said surface is affected in quasi real time.