The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 1987
Filed:
Mar. 28, 1985
Applicant:
Inventors:
Toshiharu Matsuda, Kudamatsu, JP;
Norihide Saho, Yamaguchi, JP;
Minoru Imamura, Yamaguchi, JP;
Nobuyuki Hosomi, Hikari, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
62 555 ; 55269 ; 62227 ; 622284 ; 62268 ; 417901 ;
Abstract
A cryopump and a method of operating the same, with the cryopump being provided with a cryopanel adapted to be cooled with cold heat generated by a cold heat generating device, and remove the ambient gas, and a device for regulating the temperature of said cryopanel in accordance with the ambient conditions. The cryopump is capable of varying its pumping speed by regulating in accordance with the ambient conditions the temperature of the cryopanel which is adapted to be cooled with cold heat and remove the ambient gas.