The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 1987

Filed:

Jan. 31, 1985
Applicant:
Inventors:

Johannes De Wilde, Eindhoven, NL;

Willibrordus G van Den Hoek, Eindhoven, NL;

Assignee:

U.S. Philips Corporation, New York, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
156643 ; 29571 ; 29580 ; 156656 ; 20419232 ;
Abstract

A sensor suitable for measuring magnetic field gradients spanning very small regions has a magnetic field-sensitive element (37, 42) with a very accurately defined height and thickness (even into the nanometer range) which is perpendicular to the surface of a substrate (30, 41) so that the substrate surface may be used in aligning the element (37, 42) and is manufactured by, for example, depositing magnetic field-sensitive material (9) integrally on the surface of a substrate (5) and the walls and the bottom of a groove (8) provided therein and by removing the deposited material by means of an ion etching process with an ion beam incident at right angles to the substrate surface so that only the deposited material (10) on the walls remains.


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