The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 1987
Filed:
Mar. 11, 1985
Edward H Phillips, Middletown, CA (US);
Eaton Corporation, Cleveland, OH (US);
Abstract
Docking apparatus for a semiconductor wafer prober (16). A cylindrical housing assembly provides an electrical interface between pads on the wafer (22) and contacts on the load board (76) of a test head (12) through a contact ring (74). The housing assembly is in two parts with a first part (29) clamped to a frame portion (30) of the prober and a second part (58) supported above the first part by compression springs (64). Limited angular movement is provided between the housing assembly and the prober frame. The separation between the housing members is maintained so that the force exerted on the contact ring in the docking process is determined by the compression of the springs.