The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 1987
Filed:
Jul. 30, 1985
Applicant:
Inventors:
Assignee:
501 Daikin Industries, Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01B / ;
U.S. Cl.
CPC ...
252511 ; 428327 ; 524495 ; 524496 ;
Abstract
A non-electrification polymeric composite material composed of 60-95% by weight of a copolymer of perfluoro(alkyl vinyl ether) and tetrafluoroethylene (PFA), 1-10% by weight of electrically conductive carbon, and 5-20% by weight of carbonaceous fiber powder. The weight ratio of the electrically conductive carbon contained in the polymeric composite material to the carbonaceous fiber powder also contained in the material in from 1/9 to 7/4, preferably from 2/8 to 5/5. The polymeric composite material is especially suitable as a semiconductor holder, particularly for semiconductor wafers.