The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 1987
Filed:
Jul. 21, 1986
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
An optical information recording medium is produced by introducing a plasma-generation gas comprising hydrocarbon into a plasma-generating region provided with a metal target and a substrate. The pressure of the plasma-generating gas is maintained within a predetermined range within the plasma-generating region. Electrical power is applied to the plasma-generating gas to dissociate the gas thereby forming a plasma. The generated plasma sputters the metal target, thereby allowing the sputtered metal to be deposited on the substrate in the form of a film containing the metal and the carbon liberated from the hydrocarbon. During sputtering, the product between the density of the power applied to the electrode and the average residence time of the plasma-generating gas within the plasma-generating region is controlled within such that the product falls within the range of more than 0.5 W-sec/cm.sup.2 and less than 50 W-sec/cm.sup.2, and the partial pressure of a secondary hydrocarbon, which is different from the introduced hydrocarbon, present during the dissociation to the secondary hydrocarbon before the dissociation and after the introduction is set to range between 2 and 12.