The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 1987
Filed:
Dec. 20, 1985
Applicant:
Inventor:
Herbert E Mayer, Eschen, LI;
Assignee:
The Perkin-Elmer Corporation, Norwalk, CT (US);
Primary Examiner:
Int. Cl.
CPC ...
G03B / ;
U.S. Cl.
CPC ...
356401 ; 355 53 ;
Abstract
Described is a method for facilitating the alignment of a photomask with individual fields on the surfaces of a number of wafers onto which fields the pattern of the photomask is to be imaged for projection printing, each of said number of wafers carrying an identical array of fields produced in at least one previous printing process. For this purpose it is possible to choose one out of the identical batch of wafers, measure the rotational adjustment necessary to bring each field into the correct direction in the horizontal plane and to use the measured value for an automatic rotational adjustment of all other wafers of the batch.