The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 1987
Filed:
Aug. 17, 1984
Kevin A Muething, Hillsborough Township, Somerset County, NJ (US);
AT&T Technologies, Inc., Berkeley Heights, NJ (US);
Abstract
An apparatus for automatically measuring the depth and rate of etching of a semiconductor body (10) comprises an interferometer (18) and a counter circuit (28). The interferometer (18) directs light towards the semiconductor body (10) and detects the intensity of the light reflected therefrom which varies periodically during etching. The counter circuit (28) is responsive to the periodically varying intensity of the reflected light and automatically determines the number of cycles and the frequency thereof to compute the etch depth and etch rate therefrom.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile