High density charge-coupled device imager and method of making the same

Abstract

The present invention relates to a frame transfer charge-coupled device imager which includes along a major surface of a substrate of semiconductor material a photosensing array A-register, a temporary storage B-register and an output C-register. The C-register includes a channel region in the substrate and extending along the substrate surface across the ends of and substantially perpendicular to spaced, parallel channel regions of the B-register. The C-register also includes a plurality of parallel, conductive gates extending transversely across the C-register channel region substantially parallel to the B-register channel regions. The gates include a plurality of sets with a plurality of gates per set. One gate of each set extends to a conductive termination which extends along one side of the C-register channel region over the B-register and the gates of the other sets extend to conductive terminations which are along the side of the C-register channel region opposite the B-register. At least one gate of each set extends over an end portion of a separate one of the B-register channel regions. The end portions of the B-register channel regions are made to extend directly under and be aligned with the gates of the C-register which extend over the channel region.