The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 1987
Filed:
Nov. 27, 1985
Applicant:
Inventors:
Assignees:
Rohm GmbH Chemische Fabrik, Darmstadt, DE;
Max-Planck-Gesellschaft Zur Foerderund der Wissenschaften, Goettingen, DE;
Primary Examiner:
Int. Cl.
CPC ...
G03C / ;
U.S. Cl.
CPC ...
430327 ; 430325 ; 430330 ; 430967 ;
Abstract
A method of producing X-ray resist with etching patterns, using known supports which are coated with a film comprised of copolymers of methacrylonitrile and methacrylic acid is disclosed. This method uses the following protocol.