The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 1987
Filed:
Sep. 12, 1983
Harry A Beale, Columbus, OH (US);
Battelle Development Corporation, Columbus, OH (US);
Abstract
Cubic boron nitride is deposited on a substrate by an activated reactive evaporation method involving heating a substrate in a vacuum, evaporating metal vapors into a zone between the substrate and the metals source, said source consisting of one or more materials selected from the group consisting of the elements chromium, nickel, cobalt, aluminum, and manganese; introducing a boron and nitrogen containing gas into the zone, such as borazene (B.sub.3 N.sub.3 H.sub.6), a mixture of diborane and nitrogen, or a mixture of boron trichloride and ammonia, for example, and generating an electrical field in the zone in order to ionize the metal vapors and gas atoms in the zone with an electrically negative bias impressed on the substrate, the value of the bias depending upon the particular activated reactive evaporation process utilized, whereby cubic boron is produced containing from 0.05 percent to 5.0 percent of one or more of the aforesaid elements. Pure nitrogen gas may also be co-admitted as a carrier gas so as to enable operation at higher gas flows.