The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 1987
Filed:
Jun. 10, 1985
Makoto Itonaga, Kanagawa, JP;
Kanji Kayanuma, Kanagawa, JP;
Abstract
A rotating analyzer type ellipsometer comprises a rotating analyzer for receiving light which is impinged on a sample with a predetermined incident angle and reflected by the sample, a rotary phase detecting apparatus provided so as to rotate unitarily with the rotating analyzer for generating a rotary phase signal as the rotary phase detecting apparatus rotates, a rotating mechanism for rotating the rotating analyzer and the rotary phase detecting apparatus, a photodetector for producing an output responsive to light which is passed through the rotating analyzer, and a computer for obtaining a phase difference between the rotating analyzer and the rotary phase detecting apparatus from a phase difference .phi..sub.o with which a difference between an output I.sub.p of the photodetector and a theoretical value I.sub.o becomes a minimum or substantially zero by entering into the computer the output I.sub.p of the photodetector and calculating the theoretical value I.sub.o while changing the values of the output I.sub.p and an initial value .phi..sub.o of the phase difference.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile