The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 1987
Filed:
Feb. 01, 1985
John W Peters, Malibu, CA (US);
Hughes Aircraft, Los Angeles, CA (US);
Abstract
The specification discloses a low-temperature process for depositing a layer of a conductive oxide of a chosen metal, such as tin oxide, on the surface of a substrate while simultaneously avoiding damage to the substrate. The process comprises exposing the substrate to a selected vapor phase reactant containing the chosen metal, such as tetramethyl tin, in the presence of neutral, charge-free oxygen atoms formed in a manner which avoids the generation of charged particles and high energy radiation that would damage the substrate. The oxygen atoms react with the vapor phase reactant to form the conductive oxide, which deposits as a layer on the surface of the substrate. In a preferred process embodiment, the neutral oxygen atoms are photochemically generated. This process is especially useful for depositing a layer of a transparent conductive oxide on the surface of a radiation-hardened device while maintaining the radiation-hardness of the device.