The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 1987
Filed:
Jul. 18, 1985
Applicant:
Inventors:
Sadao Sugiyama, Shiga, JP;
Hiroshi Goto, Suita, JP;
Assignee:
Omron Tateisi Electronics Co., Kyoto, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F16C / ; F16C / ;
U.S. Cl.
CPC ...
384-9 ; 384 12 ;
Abstract
A static pressure air surface stage which is adapted to control to the utmost the deflection of the movable guide caused by the reaction forces of the bearing to ensure the stable provision of the better stage run precision. The bearing pads of the movable guides are oppositely disposed by a pair on both side faces of the stationary guides.