The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 1987
Filed:
Mar. 20, 1986
Applicant:
Inventors:
N Venkataramanan, Brookfield Center, CT (US);
Charles B Zarowin, Rowayton, CT (US);
Assignee:
The Perkin-Elmer Corporation, Norwalk, CT (US);
Primary Examiner:
Int. Cl.
CPC ...
B32B / ;
U.S. Cl.
CPC ...
428688 ; 427 39 ;
Abstract
Improved diamond-like carbon films of improved properties are deposited on various substrates utilizing a plasma assisted chemical vapor transport process (PACVT) process in which hydrogen is employed as the reactive process feedgas and in which the deposition process is conducted in a controllably energetic ion bombardment of the surface on which the films are grown by introducing the hydrogen feedgas into the reactor volume through a porous graphite electrode into a defined plasma geometry.