The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 1987
Filed:
Feb. 21, 1984
Applicant:
Inventors:
Yoshihiko Miyazaki, Numazu, JP;
Taizan Goto, Numazu, JP;
Yoshizo Komiyama, Gotenba, JP;
Kotei Iwata, Gotenba, JP;
Assignee:
Toshiba Kikai Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118724 ; 118715 ; 118733 ; 118 50 ;
Abstract
An epitaxial growing apparatus comprises a base plate, a quartz bell jar mounted on the base plate, and a reaction chamber defined by the base plate and the quartz bell jar, in which an epitaxial thin film layer of a semiconductor substance is formed on the substrate mounted on a support member. A metal bell jar is disposed outside the quartz bell jar so as to surround the quartz bell jar and a plurality of engaging members are operatively connected to the metal bell jar for detachably engaging the metal bell jar with the quartz bell jar.