The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 1987
Filed:
May. 31, 1983
Applicant:
Inventor:
Paul W Palmberg, Bloomington, MN (US);
Assignee:
The Perkin-Elmer Corporation, Norwalk, CT (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
364555 ; 250305 ; 364498 ;
Abstract
A system for producing an Auger image which is substantially independent of the topographical contour of the sample surface includes at least two counting means. Preferably, the two counting means are adapted to be dedicated counters, one for background incidents and one for signal incidents. The system also includes counter control means for regulating the counting time and the immersion incident energy threshold for each counter.