The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 20, 1987

Filed:

May. 14, 1985
Applicant:
Inventors:

Masayuki Sekimura, Yokohama, JP;

Shunji Shirouzu, Ayase, JP;

Assignee:

Kabushiki Kaisha Toshiba, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F / ; G01P / ;
U.S. Cl.
CPC ...
73189 ; 73204 ;
Abstract

Disclosed is a semiconductor flow detector, comprising a semiconductor flow detecting element including a heating element and a pair of temperature-measuring elements formed in the substrate, a detecting element for detecting the temperature of the fluid under measurement, a first driving circuit for heating the heating element to keep the temperature of the semiconductor flow detecting element higher by a prescribed level than the temperature of the fluid under measurement, an electric power detection circuit for detecting the electric power flowing through the heating element so as to generate an electric power detection signal, a second driving circuit for driving the pair of the temperature-measuring elements, a temperature difference detecting circuit for detecting the temperature difference between the pair of the temperature-measuring elements so as to generate a temperature difference signal, and an arithmetic circuit for performing prescribed arithmetic operations among the electric power detection signal and the temperature difference signal so as to determine the flow rate and flowing direction of the fluid.


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