The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 1987
Filed:
Sep. 24, 1985
Steven I Boldish, Plano, TX (US);
Ethyl Corporation, Richmond, VA (US);
Abstract
A system is described enabling the flow of gaseous substances to be altered or switched from one line to another as desired without need for lubricants or having parts in continuous frictional contact with each other. In essence, the system is composed of (a) a first chamber having a gas entry port, and a pair of gas exit ports; (b) a second chamber adapted to receive gas flowing through one of the exit ports, and additionally having a gas discharge port and a separate gas inlet port to receive another flow of gas; (c) a third chamber adapted to receive gas flowing through the other of the exit ports, and additionally having a gas discharge port and a separate gas inlet port to receive another flow of gas; and (d) an internal valve for alternatively sealing off one or the other of the gas exit ports. Preferably, the valve is magnetically actuated by means of a sub-system which is itself pneumatically actuated. The advantage of using the system in MOCVD are described.